ME141B
ME 141B - MEMS: Processing and Device Characterization
Mechanical Engineering
College of Engineering
Full Course Title
MEMS: Processing and Device Characterization
Instructor Name(s)
Pennathur
Course Description
Lectures and laboratory on semiconductor-based processing for MEMS. Description of key equipment and characterization tools used for MEMS and design, fabrication, characterization and testing of MEMS. Emphasis on current MEMS devices including accelerometers, comb drives, micro-reactors and capacitor-actuators.
Unit Value
4
Maximum number of times course can be repeated for additional credit
0
Maximum Units
4