MATRL215A
MATRL 215A - Semiconductor Device Processing
Materials
College of Engineering
Full Course Title
Semiconductor Device Processing
Instructor Name(s)
Palmstrom
Course Description
Intensive theoretical and laboratory instruction in solid-state device and integrated circuit fabrication. Topics include 1) semiconductor material properties and characterization; 2) phase diagrams; 3) diffusion; 4) thermal oxidation; 5) vacuum processes; 6) thin-film deposition; 7) scanning electron microscopy. Both gallium arsenide and silicon technologies are presented.
Unit Value
4
Maximum number of times course can be repeated for additional credit
99
Maximum Units
99
Prerequisites
Advisory Enrollment Comments
Same course as ECE 220A.