ECE141B
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ECE 141B - MEMS: Processing and Device Characterization
Full Course Title
MEMS: Processing and Device Characterization
Instructor Name(s)
Pennathur
Course Description
Lectures and laboratory on semiconductor-based processing for MEMS. Description of key equipment and characterization tools used for MEMS and design, fabrication, characterization and testing of MEMS. Emphasis on current MEMS devices including accelerometers, comb drives, micro-reactors and capacitor-actuators.
Unit Value
4
Maximum number of times course can be repeated for additional credit
0
Maximum Units
4
Recommended Preparation
ME 163
Prerequisites
ME 141A or ECE 141A.
Advisory Enrollment Comments
ME 141B and ECE 141B are the same course.